Mechanical characterization of nanopillars by atomic force microscopy

Micro- and nano-patterns are gaining increasing attraction in several fields ranging from nanoelectronics to bioengineering. The mechanical properties of the nanostructures (nanopillars, nanotubes, nanowires, etc.) highly relevant for many applications but challenging determine. Existing characterization methods require mounting testing setup inside a scanning electron microscope (SEM) additional sample modification. Here, we propose two atomic force microscopy (AFM) methods, based on contact mode imaging (CMI) spectroscopy (FSI), determine characteristics individual micro- nanopillars as fabricated, without using SEM. We present working principles both case studies fabricated by additive manufacturing methods: two-photon polymerization (2PP) beam induced deposition (EBID). Various parameters were determined CMI FSI, respectively. For 2PP nanopillars, measured stiffness (13.5 ± 3.2 N/m 15.9 2.6 N/m), maximum lateral (883.0 89.5 nN 889.6 113.6 nN), deflection (64.2 13.6 nm 58.3 14.24 nm), failure stress (0.3 0.03 GPa 0.3 0.02 GPa), adhesion (56.6 4.5 µN 58.6 5.2 µN). EBID (2.9 0.2 2.7 0.4 GPa). similar results obtained techniques confirmed efficacy consistency methods. proposed methodologies have potential enabling otherwise impossible measurements particularly when specimens need be tested under wet conditions, such patterns mechanobiological studies.